2.3.3.1.93. NXibeam_column¶
Status:
base class, extends NXcomponent
Description:
Base class for a set of components equipping an instrument with FIB capabilities ...
Base class for a set of components equipping an instrument with FIB capabilities.
Focused-ion-beam (FIB) capabilities turn especially scanning electron microscopes into specimen preparation labs. FIB is a material preparation technique whereby portions of the sample are illuminated with a focused ion beam with controlled intensity. The beam is controlled such that it is intense, focused, and equipped with sufficient ion having sufficient momentum to remove material in a controlled manner.
The fact that an electron microscope with FIB capabilities achieves these functionalities via a second component (aka the ion gun) that has its own relevant control circuits, focusing lenses, and other components, warrants the definition of an own base class to group these components and distinguish them from the lenses and components for creating and shaping the electron beam.
For more details about the relevant physics and application examples consult the literature, for example:
Symbols:
No symbol table
- Groups cited:
NXactuator, NXaperture, NXatom, NXbeam, NXcomponent, NXdeflector, NXelectromagnetic_lens, NXmonochromator, NXscan_controller, NXsensor, NXsource
Structure:
operation_mode: (optional) NX_CHAR
Tech-partner, microscope-, and control-software-specific name of the ...
Tech-partner, microscope-, and control-software-specific name of the specific operation mode how the ibeam_column and its components are controlled to achieve specific illumination conditions.
In many cases the users of an instrument do not or can not be expected to know all intricate spatiotemporal dynamics of their hardware. Instead, they rely on assumptions that the instrument, its control software, and components work as expected to focus on their research questions.
For these cases, having a place for documenting the operation_mode is useful in as much as at least some constraints on how the illumination conditions were is documented.
ion_source: (optional) NXsource
The source which creates the ion beam.
Given name/alias for the ion gun.
emitter_type: (optional) NX_CHAR
Emitter type used to create the ion beam. ...
Emitter type used to create the ion beam.
If the emitter type is other, give further details in the description field.
Any of these values:
liquid_metal|plasma|gas_field|otherdescription: (optional) NX_CHAR ⤆
Ideally, a (globally) unique persistent identifier, link, ...
Ideally, a (globally) unique persistent identifier, link, or text to a resource which gives further details.
flux: (optional) NX_NUMBER {units=NX_ANY}
Average/nominal flux
brightness: (optional) NX_NUMBER {units=NX_ANY}
Average/nominal brightness
current: (optional) NX_NUMBER {units=NX_CURRENT}
Charge current
voltage: (optional) NX_NUMBER {units=NX_VOLTAGE}
Ion acceleration voltage upon source exit and ...
Ion acceleration voltage upon source exit and entering the vacuum flight path.
ion_energy_profile: (optional) NX_NUMBER {units=NX_ENERGY}
To be defined more specifically. Community suggestions are welcome.
probe: (optional) NXatom
Which elements, ions, or molecular ions form the beam. ...
Which elements, ions, or molecular ions form the beam. Examples are gallium, helium, neon, argon, krypton, or xenon, O2+.
ELECTROMAGNETIC_LENS: (optional) NXelectromagnetic_lens
APERTURE: (optional) NXaperture
DEFLECTOR: (optional) NXdeflector
blankerID: (optional) NXdeflector
A component for blanking the ion beam or generating pulsed ion beams.
MONOCHROMATOR: (optional) NXmonochromator
SENSOR: (optional) NXsensor
ACTUATOR: (optional) NXactuator
BEAM: (optional) NXbeam
Individual characterization results for the position, shape, ...
Individual characterization results for the position, shape, and characteristics of the ion beam.
NXtransformations should be used to specify the location or position at which details about the ion beam are probed.
COMPONENT: (optional) NXcomponent
scan_controller: (optional) NXscan_controller
Hypertext Anchors¶
List of hypertext anchors for all groups, fields, attributes, and links defined in this class.
