2.3.3.3.70. NXcorrector_cs¶
Status:
base class (contribution), extends NXcomponent
Description:
Base class for a corrector reducing (spherical) aberrations in electron microsco ...
Base class for a corrector reducing (spherical) aberrations in electron microscopy.
Different technology partners use different conventions and models for quantifying the aberration coefficients.
The corrector in an electron microscope is composed of multiple lenses and multipole stigmators with details that are specific for the technology partner and microscope. Most technical details are proprietary knowledge.
If one component corrects for multiple types of aberrations (like it is the case reported here CEOS) follow this design:
Use NXcorrector_cs for spherical aberration
Use NXmonochromator for energy filtering or chromatic aberration
Use the group corrector_ax in NXem for axial astigmatism aberration
Symbols:
The symbols used in the schema to specify e.g. dimensions of arrays.
n_img: Number of images taken, at least one.
- Groups cited:
NXaberration, NXaperture, NXdeflector, NXimage, NXlens_em, NXprocess
Structure:
applied: (optional) NX_BOOLEAN ⤆
Was the corrector used?
TABLEAU: (optional) NXprocess
Specific information about the alignment procedure that is a process during wh ...
Specific information about the alignment procedure that is a process during which the corrector is configured to enable calibrated usage of the instrument.
This NXprocess group should also be used when one describes in a computer simulation the specific details about the modelled or assumed aberrations.
description: (optional) NX_CHAR
Discouraged free-text field to add further details about the alignment ...
Discouraged free-text field to add further details about the alignment procedure.
tilt_angle: (optional) NX_NUMBER (Rank: 1, Dimensions: [n_img]) {units=NX_ANGLE}
The outer tilt angle of the beam in tableau acquisition. ...
The outer tilt angle of the beam in tableau acquisition.
TODO: The relevant axes which span the tilt_angle need a cleaner description.
exposure_time: (optional) NX_NUMBER (Rank: 1, Dimensions: [n_img]) {units=NX_TIME}
The exposure time of single tilt images.
magnification: (optional) NX_NUMBER (Rank: 1, Dimensions: [n_img]) {units=NX_DIMENSIONLESS}
The factor of enlargement of the apparent size, ...
The factor of enlargement of the apparent size, not the physical size, of an object.
model: (optional) NX_CHAR
Convention used for storing measured or estimated aberrations (for each imag ...
Convention used for storing measured or estimated aberrations (for each image or final) via fields c_1, a_1, c_1_0, c_1_2_a, and so on and so forth.
See S. J. Pennycock and P. D. Nellist (page 44ff, and page 118ff) for different definitions available and further details. Table 7-2 of Ibid. publication (page 305ff) documents how to convert from the Nion to the CEOS definitions. Conversion tables are also summarized by Y. Liao.
Any of these values:
ceos
|nion
IMAGE: (optional) NXimage
Image(s) taken during the alignment procedure
c_1: (optional) NXaberration
a_1: (optional) NXaberration
b_2: (optional) NXaberration
a_2: (optional) NXaberration
c_3: (optional) NXaberration
s_3: (optional) NXaberration
a_3: (optional) NXaberration
b_4: (optional) NXaberration
d_4: (optional) NXaberration
a_4: (optional) NXaberration
c_5: (optional) NXaberration
s_5: (optional) NXaberration
r_5: (optional) NXaberration
a_6: (optional) NXaberration
c_1_0: (optional) NXaberration
c_1_2_a: (optional) NXaberration
c_1_2_b: (optional) NXaberration
c_2_1_a: (optional) NXaberration
c_2_1_b: (optional) NXaberration
c_2_3_a: (optional) NXaberration
c_2_3_b: (optional) NXaberration
c_3_0: (optional) NXaberration
c_3_2_a: (optional) NXaberration
c_3_2_b: (optional) NXaberration
c_3_4_a: (optional) NXaberration
c_3_4_b: (optional) NXaberration
c_4_1_a: (optional) NXaberration
c_4_1_b: (optional) NXaberration
c_4_3_a: (optional) NXaberration
c_4_3_b: (optional) NXaberration
c_4_5_a: (optional) NXaberration
c_4_5_b: (optional) NXaberration
c_5_0: (optional) NXaberration
c_5_2_a: (optional) NXaberration
c_5_2_b: (optional) NXaberration
c_5_4_a: (optional) NXaberration
c_5_4_b: (optional) NXaberration
c_5_6_a: (optional) NXaberration
c_5_6_b: (optional) NXaberration
LENS_EM: (optional) NXlens_em
APERTURE: (optional) NXaperture
DEFLECTOR: (optional) NXdeflector
Hypertext Anchors¶
List of hypertext anchors for all groups, fields, attributes, and links defined in this class.