2.3.3.3.116. NXem_eds

Status:

base class, extends NXem_method

Description:

Base class method-specific for energy-dispersive X-ray spectroscopy (EDS/EDXS). ...

Base class method-specific for energy-dispersive X-ray spectroscopy (EDS/EDXS).

IUPAC instead of Siegbahn notation should be used.

X-ray spectroscopy is a surface-sensitive technique. Therefore, three-dimensional elemental characterzation requires typically a sequence of characterization and preparation of the surface to expose a new surface layer that can be characterized in the next acquisition. In effect, the resulting three-dimensional elemental information mappings are truely the result of a correlation and post-processing of several measurements which is the field of correlative tomographic usage of electron microscopy.

Symbols:

n_photon_energy: Number of X-ray photon energy (bins)

n_elements: Number of identified elements

n_peaks: Number of peaks detected

n_iupac_line_names: Number of IUPAC line names

Groups cited:

NXdata, NXimage_set, NXion, NXpeak, NXprocess, NXprogram

Structure:

indexing: (optional) NXprocess

Details about computational steps how peaks were indexed as elements.

atom_types: (optional) NX_CHAR (Rank: 1, Dimensions: [n_elements])

Comma-separated list of names of elements confirmed in the sample via EDS an ...

Comma-separated list of names of elements confirmed in the sample via EDS analysis.

All members of the list have to be valid chemical_symbols from the periodic table.

This field can be used when creating instances of NXpeak is not desired. However, a collection of instances of NXpeak with individual NXion specified enables also to distinguish isotopic information.

PROGRAM: (optional) NXprogram

The program with which the indexing was performed.

summary: (optional) NXdata

Accumulated intensity over all pixels of the region-of-interest.

intensity: (optional) NX_NUMBER (Rank: 1, Dimensions: [n_photon_energy]) {units=NX_UNITLESS}

Accumulated counts

@long_name: (optional) NX_CHAR

Counts

axis_energy: (optional) NX_NUMBER (Rank: 1, Dimensions: [n_photon_energy]) {units=NX_ENERGY}

Energy axis

@long_name: (optional) NX_CHAR

Energy

PEAK: (optional) NXpeak

Name and location of each X-ray line which was indexed as a known ion. ...

Name and location of each X-ray line which was indexed as a known ion. For each ion, an NXion instance should be created which specifies the origin of the signal. For each ion also the relevant IUPAC notation X-ray lines should be specified.

ION: (optional) NXion

energy_range: (optional) NX_NUMBER (Rank: 1, Dimensions: [2]) {units=NX_ENERGY}

Associated lower :math:`[e_{min}, e_{max}]` bounds of the ...

Associated lower \([e_{min}, e_{max}]\) bounds of the energy which is assumed associated with this peak.

energy: (optional) NX_NUMBER {units=NX_ENERGY}

Theoretical energy of the line according to IUPAC.

iupac_line_names: (optional) NX_CHAR (Rank: 1, Dimensions: [n_iupac_line_names])

IUPAC notation identifier of the line which the peak represents. ...

IUPAC notation identifier of the line which the peak represents.

This can be a list of IUPAC notations for (the seldom) case that multiple lines are grouped with the same peak.

IMAGE_SET: (optional) NXimage_set

Individual element-specific EDS/EDX/EDXS/SXES mapping ...

Individual element-specific EDS/EDX/EDXS/SXES mapping

A composition map is an image whose intensities for each pixel are the accumulated X-ray quanta under the curve(s) of a set of peaks.

These element-specific EDS maps are NXimage_set instances and need to be named with the name of the element from the atom_types field.

We often observe that signal contributions from several peaks are summarized and shown together, e.g. the combined signal under the curve of carbon and oxygen.

In this case specify the processing details using peaks and weights.

description: (optional) NX_CHAR

Discouraged free-text field to add additional information.

iupac_line_candidates: (optional) NX_CHAR

Comma-separated list of chemical_symbol-IUPAC X-ray (emission) line name t ...

Comma-separated list of chemical_symbol-IUPAC X-ray (emission) line name that documents which elements and their specific lines are theoretically located within the energy_range of the spectrum from which the EDS (element) map has been computed.

energy_range: (optional) NX_NUMBER (Rank: 1, Dimensions: [2]) {units=NX_ENERGY}

Associated :math:`[e_{min}, e_{max}]` bounds of the energy ...

Associated \([e_{min}, e_{max}]\) bounds of the energy range for which spectrum counts have been accumulated.

PROCESS: (optional) NXprocess

peaks: (optional) NX_CHAR (Rank: 1, Dimensions: [n_peaks])

A list of NXpeak instance names whose X-ray quanta ...

A list of NXpeak instance names whose X-ray quanta where accumulated for each pixel which yields an element-specific EDS map.

weights: (optional) NX_NUMBER {units=NX_UNITLESS}

A list of weights by how much the intensity of each peak ...

A list of weights by how much the intensity of each peak under peaks was factorized to display the joint intensity of the image.

Hypertext Anchors

List of hypertext anchors for all groups, fields, attributes, and links defined in this class.

NXDL Source:

https://github.com/FAIRmat-NFDI/nexus_definitions/tree/fairmat/contributed_definitions/NXem_eds.nxdl.xml