2.3.3.2.7. NXem¶
Status:
application definition, extends NXobject
Description:
Application definition for normalized representation of electron microscopy rese ...
Application definition for normalized representation of electron microscopy research.
This application definition is a comprehensive, general description for the standardization of data and metadata collected using electron microscopy.
NXem is designed to be used for documenting experiments or computer simulations in which controlled electron beams are used to study electron-beam matter interactions, to simulate this, to explore physical mechanisms and phenomena, or to characterize materials.
The NeXus application definition NXem defines a hierarchical data model with ten building blocks:
The data model represents a tree of concepts. The tree is constructed from groups of concepts representing the branches surplus fields and attributes representing leafs.
NXem an introduction for typical use cases in material characterization and simulation:
Transmission electron microscopy (TEM) and Scanning Transmission Electron Microscopy (STEM) Scanning Electron Microscopy (SEM) Scanning Electron Microscopy combined a Focused-Ion Beam (SEM/FIB)
A deeper dive into the branches of NXem:
NXem is constructed from composing and specializing base classes into the following ten categories:
The field
definition
specifies that the data schema is NXem. In combination with administrative metadata such as theNeXus_version
provided by NXroot this specifies which version of NXem the instance data in a NeXus/HDF5 file are compliant with.The fields
identifier_experiment
,experiment_alias
,experiment_description
and the groupuserID
provide concepts for storing organizational metadata that contextualize the work within the research workflow and humans involved in this.The fields
start_time
,end_time
provide concepts for framing a temporal context for the research.The groups
citeID
,noteID
provide concepts for adding contextual details such as citations that are associated with or notes, i.e. other artifacts that are deemed relevant when reporting about a measurement or simulation. These groups are useful when NXem is used as a serialization format for technology-partner-agnostic archival of data and metadata that have been collected during a session with an electron microscope or when a simulation was performed.The group
sampleID
provides concepts for storing metadata about the sample that was characterized or simulated during the session.The group
measurement
provides concepts that are useful for describing a measurement during a session with an electron microscope. This includes the chain of events of data and metadata that were collected during such a session.The group``simulation`` provides concepts that are useful for describing a simulation of an electron beam that interacts with matter. Combined with
measurement
this provides a data schema for defining a digital twin of the microscope and its optical setup.The groups
consistent_rotations
,NAMED_reference_frame
provide concepts for reporting coordinate systems (frames of reference) and rotation conventions that clarify how data should be interpreted specifying the rotation of orientable objects in the microscope, its components, or of crystals and crystal defects in the material analyzed. These metadata support interpretation for downstream or on-the-fly data analyses which electron microscopes typically nowadays perform during a session. Examples are the indexing of diffraction patterns, image analysis in general, or analyses of the chemical composition.The group
roiID
provides concepts for reporting several domain- and technique-specific configuration parameter and results of data processing steps that were applied.The group
profiling
provides concepts for reporting computational details such as programs and libraries used, for documenting the libraries of virtual environments such as those used by conda or python virtual environment, including details about the computing hardware used, and documenting capabilities for performance analyses and benchmarking of the software or its parts.Design choices:
Specific details about how an electron microscope was used and eventually its configuration modified differ between user groups. This holds also true for computer simulations of electron-beam matter interaction. Different peer groups in different sub-domains in electron microscopy consider different data and metadata relevant. NXem defines constraints on the existence and cardinality of concepts and its concept branches but seeks to offer a compromise. The key design pattern followed is that most branches are made optional or at most recommended but their child concepts conditional required. Thereby, NXem can cover a variety of simple but also complex use cases. An example of this parent-optional-but-childs-stronger-restricted design is the combination of the optional group
measurement
with its required childmeasurement/instrument
: Users which report simulations are not forced to document the instrument but users which have characterized a sample are motivated to report about the instrument. They are though not necessarily required to report all the details of the instruments’ components because the design pattern is-used applied recursively.Inclusive design, one schema for scanning, focused-ion beam, and transmission electron microscopes:
Contrary to many other proposals of a data schema for electron microscopy, NXem seeks to highlight the similarity of the three fundamental types of electron microscopes that are nowadays used most routinely in academia and industry: An electron microscope is a beamline that provides a controlled beam of electrons combined with eventually beams of other particles (ions) to investigate electron/ion(-beam) matter interaction. This design of per-particle-type concept branches is realized in the base classes
NXebeam_column
andNXibeam_column
. These provide concepts for reporting the technical components that are typically used for generating a controllable (and typically scanning) beam of particles such as electrons or ions.Focused-ion beam capabilities are modelled by adding an optional group
measurement/instrument/ibeam_column
. We foresee that this design is beneficial also in the future when research should be documented where photon-electron interactions via an electron microscope are combined. The current proposal though does not include such aNXpbeam_column
base class that could be used for photon-/light-beam, i.e. laser plus optical beam path descriptions and components.We acknowledge that scanning and transmission electron microscopes are different types of instruments that have distinct differences in the electron-optical setup and the components used. What remains the same from the perspective of an observer who monitors the experiment inside the electron-matter interaction volume, i.e. in, on, or close to the surface of the specimen is the imaginary split into an upper and a lower half-space. In the upper half-space a specific but eventually differently shaped electron beam illuminates the specimen when comparing a scanning with a transmission electron microscope. In the lower half-space the beam or particles exit the specimen or end up thermalized in thick specimens.
NXem distinguishes and stores instance data based on how long they remain unchanged:
measurement
provides two groupsmeasurement/instrument
andmeasurement/eventID
. The first group is designed for storing metadata about the instrument which do not change over the course of the session. Examples are the name of the technology partner who built the microscope, the microscope’s serial number, or the type of lenses mounted, etc. The second group is designed for metadata and data that are collected during the microscope session. For these, specializations ofNXdata
specificallyNXimage
andNXspectrum
are provided. Eachmeasurement/eventID
event can be time-stamped individually. Each instance of a groupmeasurement/eventID
containsmeasurement/instrument
whose purpose is to store those specific state and settings of the microscope that was present during the collection of the event. This includes lens settings, apertures used, aberrations, and other components, etc. By virtue of design this reduces unnecessary repetition of metadata stored in the first group like is often observed in image-based archival formats like TIFF, PNG, etc.NXem offers domain-specific classes for standardized reporting of method-specific configurations, data processing, and results:
These include
NXem_img
for generic and specific imaging including diffraction,NXem_eds
for energy-dispersive X-ray spectroscopy,NXem_ebsd
for electron backscatter diffraction, as well asNXem_eels
for electron energy loss spectroscopy. These branches provide examples that proof how NeXus can be used for combining session-centric data storage with data processing. These examples are naturally incomplete but show at different levels of technical depth and breath how standardization can be useful even to report specifically formatted data representations like multi-dimensional plotting. Thereby, downstream processing using software for data analyses or research data management can take advantage of a standardized reporting rather than demanding for a zoo of parsers that interconvert between many representations.NXem within the ecosystem of data schemata for electron microscopy:*
We support the statement that substantially fewer standardized rather than many ad hoc schemata are required to facilitate the documentation and exchange of knowledge within electron microscopy. We tailored NXem to serve the materials science and materials engineering usage of electron microscopy to provide a complementary coverage to what OMERO has established for the bio- and life science usage of electron microscopy.
Symbols:
No symbol table
- Groups cited:
NXaberration, NXactuator, NXaperture, NXatom, NXbeam, NXcite, NXcollection, NXcomponent, NXcoordinate_system, NXcorrector_cs, NXcs_profiling, NXdata, NXdeflector, NXdetector, NXebeam_column, NXelectromagnetic_lens, NXem_ebsd, NXem_eds, NXem_eels, NXem_event_data, NXem_img, NXem_instrument, NXem_interaction_volume, NXem_measurement, NXem_optical_system, NXem_simulation, NXentry, NXfabrication, NXibeam_column, NXimage, NXmanipulator, NXmicrostructure_ipf, NXmicrostructure_odf, NXmicrostructure_pf, NXmicrostructure, NXmonochromator, NXnote, NXparameters, NXphase, NXprocess, NXprogram, NXpump, NXroi_process, NXsample, NXscan_controller, NXsensor, NXsource, NXspectrum, NXunit_cell, NXuser
Structure:
ENTRY: (required) NXentry
definition: (required) NX_CHAR ⤆
Obligatory value:
NXem
identifier_experiment: (optional) NX_CHAR ⤆
A (globally) unique persistent identifier for referring to this experiment.
experiment_alias: (optional) NX_CHAR
Alias (short name) which scientists can use to refer to this experiment.
experiment_description: (optional) NX_CHAR ⤆
Free-text description about the experiment. ...
Free-text description about the experiment.
Users are strongly advised to parameterize the description of their experiment by using respective groups and fields and base classes instead of writing prose into the field.
start_time: (required) NX_DATE_TIME ⤆
ISO 8601 time code with local time zone offset to UTC information included ...
ISO 8601 time code with local time zone offset to UTC information included when the microscope session started. If the application demands that time codes in this section of the application definition should only be used for specifying when the experiment was performed - and the exact duration is not relevant - use this start_time field.
Often though it is useful to specify a time interval via setting both a start_time and an end_time because this enables software tools and users to collect a more detailed bookkeeping of the experiment.
Users should be aware though that even using only start_time and end_time may not be sufficient to infer how long the experiment took or for how long data were acquired. To bookkeep more fine-grained timestamps over the course of the experiment is possible with start_time and end_time fields of respective NXem_event_data instances.
end_time: (recommended) NX_DATE_TIME ⤆
ISO 8601 time code with local time zone offset to UTC included when ...
ISO 8601 time code with local time zone offset to UTC included when the microscope session ended.
See docstring of the start_time field to see how to use the start_time and end_time together.
profiling: (optional) NXcs_profiling
The configuration of the software that was used to generate this NeXus file.
programID: (optional) NXprogram
A collection of all programs and libraries used to generate this NeXus fil ...
A collection of all programs and libraries used to generate this NeXus file. Ideally, this would enable a binary recreation from the input data.
Examples include the name and version of the libraries used to write the instance. Ideally, the software which writes these NXprogram instances also includes the version of the set of NeXus classes i.e. the specific set of base classes, application definitions, and contributed definitions with which the here described concepts can be resolved.
For the pynxtools library which is used by the NOMAD research data management system, it makes sense to store e.g. the GitHub repository commit and respective submodule references used.
Instances can also be used to document the modules and libraries that are offered by the computational environment such as those parsed from conda or python virtualenv environments.
citeID: (optional) NXcite
Collection of serialized resources associated with the experiment. ...
Collection of serialized resources associated with the experiment. Examples of such resources are files which are formatted using proprietary data models of technology partners as those generated by the control software of the microscope during the instrument session.
file_name: (required) NX_CHAR ⤆
Information about persons who performed or were involved in the microscope ...
Information about persons who performed or were involved in the microscope session or simulation run.
identifierNAME: (recommended) NX_CHAR ⤆
Given (first) name and surname.
affiliation: (optional) NX_CHAR ⤆
Name of the affiliation at the point in time when the experiment was performed.
Postal address of the affiliation.
Email address at the point in time when the experiment was performed. ...
Email address at the point in time when the experiment was performed.
Writing the most permanently used email is recommended.
telephone_number: (optional) NX_CHAR ⤆
Telephone number at the point in time when the experiment was performed.
User role at the point in time when the experiment was performed. ...
User role at the point in time when the experiment was performed.
Examples are technician operating the microscope, student, postdoc, principle investigator, or guest.
sampleID: (required) NXsample ⤆
A physical entity which contains material intended to be investigated. ...
A physical entity which contains material intended to be investigated. Sample and specimen are treated as de facto synonyms. Samples can be real or virtual ones as annotated via is_simulation.
The suggested best practice is to call this group sample. In those cases when multiple samples need to be grouped inside one entry, these SAMPLE groups should be named using the prefix sample followed an index starting from 1, i.e. (sample1, sample2).
There are at least two strategies how to store (meta)data when one analyzes multiple samples - not different ROIs on a single sample though - in one session.
One strategy is to store each sample and its results under an own NXem/ENTRY. This is one of the most frequent use cases as during most sessions typically only a single sample is investigated. In this case the name of this group should be sample.
If multiple samples are investigated storing each of them in their own ENTRY group eventually will demand unnecessary duplication of instrument details.
This can be avoided by using another strategy for storing samples and their results. Namely, by using only one instance of NXem/ENTRY. That NXem/ENTRY should then be named, like in the previous case, NXem/entry1 and the samples should be named sample1, sample2, etc., i.e. instances should use sample as a name prefix.
In this case the collection of events should use identifier_sample to state clearly for which of the samples loaded the (characterization) event was detected.
This concept is related to term Specimen of the EMglossary standard.
is_simulation: (required) NX_BOOLEAN
Qualifier whether the sample is a real (in which case is_simulation should ...
Qualifier whether the sample is a real (in which case is_simulation should be set to false) or a virtual one (in which case is_simulation should be set to true).
physical_form: (recommended) NX_CHAR ⤆
Any of these values or a custom value (if you use a custom value, also set @custom=True):
bulk
|foil
|thin_film
|powder
identifier_sample: (recommended) NX_CHAR ⤆
Ideally, (globally) unique persistent identifier which distinguishes this ...
Ideally, (globally) unique persistent identifier which distinguishes this sample from all others and especially the predecessor/origin from where that sample was cut off. An example of cutting off is a steel sheet that is the parent sample from which a small portion was wire-eroded that represents the sample that was then prepared for characterization with an electron microscope.
The terms sample and specimen are here considered as exact synonyms.
This field must not be used for an alias for the sample name. Instead, use name.
In cases where multiple specimens were loaded into the microscope, the identifier has to resolve the specific sample, whose results are stored by this NXentry instance, because a single NXentry should be used for the characterization of a single specimen.
Details about the specimen preparation should be stored in resources referring to identifier_parent.
identifier_parent: (recommended) NX_CHAR ⤆
Identifier of the sample from which the sample was cut off or the string * ...
Identifier of the sample from which the sample was cut off or the string None. I.e. the parent to this sample.
The purpose of this field is to support functionalities for tracking sample provenance in a research data management system.
preparation_date: (required) NX_DATE_TIME ⤆
ISO 8601 time code with local time zone offset to UTC information ...
ISO 8601 time code with local time zone offset to UTC information when the specimen was prepared.
Ideally, report the end of the preparation, i.e. the last known timestamp when the measured specimen surface was actively prepared. Ideally, this matches the last timestamp that is mentioned in the digital resource pointed to by identifier_parent.
Knowing when the specimen was exposed to e.g. specific atmosphere is especially required for material that is sensitive to the environment such as specimens that were charged with fast diffusing elements or short-lived radioactive tracers.
Additional time stamps prior to preparation_date are better placed in resources which describe but do not pollute the description here with prose. Resolving these connected metadata is considered the responsibility of the research data management system and not the a NeXus file.
Specimen name
atom_types: (required) NX_CHAR
List of comma-separated elements from the periodic table that are containe ...
List of comma-separated elements from the periodic table that are contained in the sample. If the sample substance has multiple components, all elements from each component must be included in atom_types.
The purpose of the field is to offer research data management systems an opportunity to parse the relevant elements without having to interpret these from the resources pointed to by identifier_parent or walk through eventually deeply nested groups in individual data instances.
thickness: (optional) NX_NUMBER {units=NX_LENGTH}
(Measured) sample thickness. ...
(Measured) sample thickness.
The information is recorded to qualify if the beam used was likely able to shine through the specimen. For scanning electron microscopy, in many cases the specimen is typically thicker than what is illuminatable by the electron beam.
In this case the value should be set to the actual thickness of the specimen viewed for an illumination situation where the nominal surface normal of the specimen is parallel to the optical axis.
density: (optional) NX_NUMBER {units=NX_ANY}
(Measured) density of the specimen. ...
(Measured) density of the specimen.
For multi-layered specimens this field should only be used to describe the density of the excited volume. For scanning electron microscopy the usage of this field is discouraged and instead an instance of a region-of-interest connected to individual NXem_event_data instances can provide a cleaner description of the relevant details.
description: (optional) NX_CHAR ⤆
Discouraged free-text field to provide further detail.
consistent_rotations: (recommended) NXparameters ⤆
The conventions used when reporting crystal orientations. ...
The conventions used when reporting crystal orientations. We follow the best practices of the Material Science community that are defined in reference https://doi.org/10.1088/0965-0393/23/8/083501.
rotation_handedness: (required) NX_CHAR
Convention how a positive rotation angle is defined when viewing ...
Convention how a positive rotation angle is defined when viewing from the end of the rotation unit vector towards its origin. This is in accordance with convention 2 of reference https://doi.org/10.1088/0965-0393/23/8/083501.
Counter_clockwise is equivalent to a right-handed choice. Clockwise is equivalent to a left-handed choice.
Any of these values:
counter_clockwise
|clockwise
rotation_convention: (required) NX_CHAR
How are rotations interpreted into an orientation according to convention ...
How are rotations interpreted into an orientation according to convention 3 of reference https://doi.org/10.1088/0965-0393/23/8/083501.
Any of these values:
passive
|active
euler_angle_convention: (required) NX_CHAR
How are Euler angles interpreted given that there are several choices (e.g ...
How are Euler angles interpreted given that there are several choices (e.g. zxz, xyz) according to convention 4 of reference https://doi.org/10.1088/0965-0393/23/8/083501.
The most frequently used convention in Materials Science is zxz, which is based on the work of H.-J. Bunge but using other conventions is possible. Proper Euler angles are distinguished from (improper) Tait-Bryan angles.
Any of these values:
zxz
xyx
yzy
zyz
xzx
yxy
xyz
yzx
zxy
xzy
zyx
yxz
axis_angle_convention: (required) NX_CHAR
To which angular range is the rotation angle argument of an ...
To which angular range is the rotation angle argument of an axis-angle pair parameterization constrained according to convention 5 of reference https://doi.org/10.1088/0965-0393/23/8/083501.
Obligatory value:
rotation_angle_on_interval_zero_to_pi
sign_convention: (required) NX_CHAR
Which sign convention is followed when converting orientations ...
Which sign convention is followed when converting orientations between different parametrizations/representations according to convention 6 of reference https://doi.org/10.1088/0965-0393/23/8/083501.
Any of these values:
p_plus_one
|p_minus_one
NAMED_reference_frameID: (optional) NXcoordinate_system
processing_reference_frame: (recommended) NXcoordinate_system
alias: (optional) NX_CHAR
origin: (recommended) NX_CHAR ⤆
Location of the origin of the processing_reference_frame. ...
Location of the origin of the processing_reference_frame.
It is assumed that regions-of-interest in this reference frame form a rectangle or cuboid. Edges are interpreted by inspecting the direction of their outer unit normals (which point either parallel or antiparallel) along respective base vector direction of the reference frame.
If any of these assumptions is not met, the user is required to explicitly state this.
Any of these values or a custom value (if you use a custom value, also set @custom=True):
front_top_left
front_top_right
front_bottom_right
front_bottom_left
back_top_left
back_top_right
back_bottom_right
back_bottom_left
x_direction: (recommended) NX_CHAR ⤆
Direction of the positively pointing x-axis base vector of the ...
Direction of the positively pointing x-axis base vector of the processing_reference_frame.
Any of these values or a custom value (if you use a custom value, also set @custom=True):
north
east
south
west
in
out
y_direction: (recommended) NX_CHAR ⤆
Direction of the positively pointing y-axis base vector of the ...
Direction of the positively pointing y-axis base vector of the processing_reference_frame.
Any of these values or a custom value (if you use a custom value, also set @custom=True):
north
east
south
west
in
out
z_direction: (recommended) NX_CHAR ⤆
Direction of the positively pointing z-axis base vector of the ...
Direction of the positively pointing z-axis base vector of the processing_reference_frame.
Any of these values or a custom value (if you use a custom value, also set @custom=True):
north
east
south
west
in
out
sample_reference_frame: (recommended) NXcoordinate_system
depends_on: (optional) NX_CHAR ⤆
Reference to the specifically named :ref:`NXsample` instance(s) for ...
Reference to the specifically named NXsample instance(s) for which these conventions apply (e.g. /entry1/sample1).
alias: (optional) NX_CHAR
origin: (recommended) NX_CHAR ⤆
Location of the origin of the sample_reference_frame. ...
Location of the origin of the sample_reference_frame.
It is assumed that regions-of-interest in this reference frame form a rectangle or cuboid. Edges are interpreted by inspecting the direction of their outer unit normals (which point either parallel or antiparallel) along respective base vector direction of the reference frame.
If any of these assumptions is not met, the user is required to explicitly state this.
Any of these values or a custom value (if you use a custom value, also set @custom=True):
front_top_left
front_top_right
front_bottom_right
front_bottom_left
back_top_left
back_top_right
back_bottom_right
back_bottom_left
x_direction: (recommended) NX_CHAR ⤆
Direction of the positively pointing x-axis base vector of the ...
Direction of the positively pointing x-axis base vector of the sample_reference_frame.
Any of these values or a custom value (if you use a custom value, also set @custom=True):
north
east
south
west
in
out
y_direction: (recommended) NX_CHAR ⤆
Direction of the positively pointing y-axis base vector of the ...
Direction of the positively pointing y-axis base vector of the sample_reference_frame.
Any of these values or a custom value (if you use a custom value, also set @custom=True):
north
east
south
west
in
out
z_direction: (recommended) NX_CHAR ⤆
Direction of the positively pointing z-axis base vector of the ...
Direction of the positively pointing z-axis base vector of the sample_reference_frame.
Any of these values or a custom value (if you use a custom value, also set @custom=True):
north
east
south
west
in
out
detector_reference_frameID: (optional) NXcoordinate_system
The reference frame that is defined by a specific detector.
depends_on: (optional) NX_CHAR ⤆
Reference to the specifically named :ref:`NXdetector` instance for ...
Reference to the specifically named NXdetector instance for which these conventions apply (e.g. /entry1/instrument/detector1).
alias: (optional) NX_CHAR
origin: (recommended) NX_CHAR ⤆
Location of the origin of the detector_reference_frame. ...
Location of the origin of the detector_reference_frame.
If the regions-of-interest forms a rectangle or cuboid, it is assumed that edges are interpreted by inspecting the direction of their outer unit normals (which point either parallel or antiparallel) along respective base vector direction of the reference frame.
If any of these assumptions is not met, the user is required to explicitly state this.
Any of these values or a custom value (if you use a custom value, also set @custom=True):
front_top_left
front_top_right
front_bottom_right
front_bottom_left
back_top_left
back_top_right
back_bottom_right
back_bottom_left
x_direction: (recommended) NX_CHAR ⤆
Direction of the positively pointing x-axis base vector of the ...
Direction of the positively pointing x-axis base vector of the detector_reference_frame.
Any of these values or a custom value (if you use a custom value, also set @custom=True):
north
east
south
west
in
out
y_direction: (recommended) NX_CHAR ⤆
Direction of the positively pointing y-axis base vector of the ...
Direction of the positively pointing y-axis base vector of the detector_reference_frame.
Any of these values or a custom value (if you use a custom value, also set @custom=True):
north
east
south
west
in
out
z_direction: (recommended) NX_CHAR ⤆
Direction of the positively pointing z-axis base vector of the ...
Direction of the positively pointing z-axis base vector of the detector_reference_frame.
Any of these values or a custom value (if you use a custom value, also set @custom=True):
north
east
south
west
in
out
measurement: (optional) NXem_measurement
instrument: (required) NXem_instrument ⤆
location: (recommended) NX_CHAR ⤆
fabrication: (required) NXfabrication ⤆
programID: (recommended) NXprogram
ebeam_column: (required) NXebeam_column ⤆
fabrication: (optional) NXfabrication ⤆
electron_source: (recommended) NXsource ⤆
lensID: (optional) NXelectromagnetic_lens ⤆
apertureID: (optional) NXaperture ⤆
deflectorID: (optional) NXdeflector ⤆
blankerID: (optional) NXdeflector ⤆
monochromatorID: (optional) NXmonochromator ⤆
corrector_csID: (optional) NXcorrector_cs ⤆
A spherical aberration corrector is a typical component in a transmiss ...
A spherical aberration corrector is a typical component in a transmission electron microscope. Many instruments have only one, in this case the variadic suffix should be dropped. If there are multiple instances these should be numbered starting from 1, i.e. corrector_cs1, corrector_cs2.
Use specifically when there are multiple instances.
fabrication: (recommended) NXfabrication ⤆
corrector_ax: (optional) NXcomponent ⤆
biprismID: (optional) NXcomponent ⤆
phaseplateID: (optional) NXcomponent ⤆
sensorID: (optional) NXsensor ⤆
actuatorID: (optional) NXactuator ⤆
scan_controller: (optional) NXscan_controller ⤆
ibeam_column: (optional) NXibeam_column ⤆
fabrication: (optional) NXfabrication ⤆
ion_source: (required) NXsource ⤆
lensID: (optional) NXelectromagnetic_lens ⤆
apertureID: (optional) NXaperture ⤆
deflectorID: (optional) NXdeflector ⤆
blankerID: (optional) NXdeflector ⤆
monochromatorID: (optional) NXmonochromator ⤆
sensorID: (optional) NXsensor ⤆
actuatorID: (optional) NXactuator ⤆
scan_controller: (optional) NXscan_controller ⤆
detectorID: (optional) NXdetector ⤆
gas_injector: (optional) NXcomponent ⤆
stageID: (optional) NXmanipulator ⤆
nanoprobeID: (optional) NXmanipulator ⤆
sensorID: (optional) NXsensor ⤆
actuatorID: (optional) NXactuator ⤆
eventID: (optional) NXem_event_data ⤆
start_time: (recommended) NX_DATE_TIME ⤆
end_time: (recommended) NX_DATE_TIME ⤆
identifier_sample: (recommended) NX_CHAR ⤆
PROCESS: (recommended) NXprocess ⤆
@AXISNAME_indices: (required) NX_UINT
title: (recommended) NX_CHAR ⤆
@long_name: (required) NX_CHAR
@long_name: (required) NX_CHAR
intensity: (optional) NX_NUMBER ⤆
@long_name: (required) NX_CHAR
magnitude: (optional) NX_COMPLEX
@long_name: (required) NX_CHAR
axis_j: (required) NX_NUMBER ⤆
axis_i: (required) NX_NUMBER ⤆
@AXISNAME_indices: (required) NX_UINT
title: (recommended) NX_CHAR ⤆
@long_name: (required) NX_CHAR
@long_name: (required) NX_CHAR
intensity: (optional) NX_NUMBER ⤆
@long_name: (required) NX_CHAR
complex: (optional) NX_COMPLEX ⤆
@long_name: (required) NX_CHAR
axis_k: (required) NX_NUMBER ⤆
axis_j: (required) NX_NUMBER ⤆
axis_i: (required) NX_NUMBER ⤆
@AXISNAME_indices: (required) NX_UINT
title: (recommended) NX_CHAR ⤆
@long_name: (required) NX_CHAR
@long_name: (required) NX_CHAR
intensity: (optional) NX_NUMBER ⤆
@long_name: (required) NX_CHAR
complex: (optional) NX_COMPLEX ⤆
@long_name: (required) NX_CHAR
axis_m: (required) NX_NUMBER ⤆
axis_k: (required) NX_NUMBER ⤆
axis_j: (required) NX_NUMBER ⤆
axis_i: (required) NX_NUMBER ⤆
@AXISNAME_indices: (required) NX_UINT
title: (recommended) NX_CHAR ⤆
@long_name: (required) NX_CHAR
@long_name: (required) NX_CHAR
intensity: (optional) NX_NUMBER ⤆
@long_name: (required) NX_CHAR
complex: (optional) NX_COMPLEX ⤆
@long_name: (required) NX_CHAR
indices_group: (optional) NX_INT ⤆
indices_image: (required) NX_INT ⤆
axis_i: (required) NX_NUMBER ⤆
@AXISNAME_indices: (required) NX_UINT
title: (recommended) NX_CHAR ⤆
@long_name: (required) NX_CHAR
@long_name: (required) NX_CHAR
intensity: (optional) NX_NUMBER ⤆
@long_name: (required) NX_CHAR
complex: (optional) NX_COMPLEX ⤆
@long_name: (required) NX_CHAR
indices_group: (optional) NX_INT ⤆
indices_image: (required) NX_INT ⤆
axis_j: (required) NX_NUMBER ⤆
axis_i: (required) NX_NUMBER ⤆
@AXISNAME_indices: (required) NX_UINT
title: (recommended) NX_CHAR ⤆
@long_name: (required) NX_CHAR
@long_name: (required) NX_CHAR
intensity: (optional) NX_NUMBER ⤆
@long_name: (required) NX_CHAR
complex: (optional) NX_COMPLEX ⤆
@long_name: (required) NX_CHAR
indices_group: (optional) NX_INT ⤆
indices_image: (required) NX_INT ⤆
axis_k: (required) NX_NUMBER ⤆
axis_j: (required) NX_NUMBER ⤆
axis_i: (required) NX_NUMBER ⤆
spectrumID: (optional) NXspectrum ⤆
PROCESS: (recommended) NXprocess ⤆
spectrum_0d: (optional) NXdata ⤆
spectrum_1d: (optional) NXdata ⤆
spectrum_2d: (optional) NXdata ⤆
spectrum_3d: (optional) NXdata ⤆
@AXISNAME_indices: (required) NX_UINT
title: (recommended) NX_CHAR ⤆
intensity: (required) NX_NUMBER
@long_name: (required) NX_CHAR
indices_spectrum: (required) NX_INT
@long_name: (required) NX_CHAR
axis_i: (required) NX_NUMBER
@long_name: (required) NX_CHAR
axis_energy: (required) NX_NUMBER
@long_name: (required) NX_CHAR
instrument: (recommended) NXem_instrument ⤆
ebeam_column: (required) NXebeam_column ⤆
operation_mode: (recommended) NX_CHAR ⤆
electron_source: (optional) NXsource ⤆
lensID: (optional) NXelectromagnetic_lens ⤆
power_setting: (required) NX_CHAR_OR_NUMBER ⤆
apertureID: (optional) NXaperture ⤆
setting: (recommended) NX_CHAR_OR_NUMBER
Descriptor for the aperture setting when the exact technical detai ...
Descriptor for the aperture setting when the exact technical details are unknown or not directly controllable as the control software of the microscope does not enable or was not configured to display these values for users.
deflectorID: (optional) NXdeflector ⤆
blankerID: (optional) NXdeflector ⤆
monochromatorID: (optional) NXmonochromator ⤆
corrector_csID: (optional) NXcorrector_cs ⤆
applied: (recommended) NX_BOOLEAN ⤆
tableauID: (required) NXprocess ⤆
c_1: (optional) NXaberration ⤆
a_1: (optional) NXaberration ⤆
b_2: (optional) NXaberration ⤆
a_2: (optional) NXaberration ⤆
c_3: (optional) NXaberration ⤆
s_3: (optional) NXaberration ⤆
a_3: (optional) NXaberration ⤆
b_4: (optional) NXaberration ⤆
d_4: (optional) NXaberration ⤆
a_4: (optional) NXaberration ⤆
c_5: (optional) NXaberration ⤆
s_5: (optional) NXaberration ⤆
r_5: (optional) NXaberration ⤆
a_6: (optional) NXaberration ⤆
c_1_0: (optional) NXaberration ⤆
c_1_2_a: (optional) NXaberration ⤆
c_1_2_b: (optional) NXaberration ⤆
c_2_1_a: (optional) NXaberration ⤆
c_2_1_b: (optional) NXaberration ⤆
c_2_3_a: (optional) NXaberration ⤆
c_2_3_b: (optional) NXaberration ⤆
c_3_0: (optional) NXaberration ⤆
c_3_2_a: (optional) NXaberration ⤆
c_3_2_b: (optional) NXaberration ⤆
c_3_4_a: (optional) NXaberration ⤆
c_3_4_b: (optional) NXaberration ⤆
c_4_1_a: (optional) NXaberration ⤆
c_4_1_b: (optional) NXaberration ⤆
c_4_3_a: (optional) NXaberration ⤆
c_4_3_b: (optional) NXaberration ⤆
c_4_5_a: (optional) NXaberration ⤆
c_4_5_b: (optional) NXaberration ⤆
c_5_0: (optional) NXaberration ⤆
c_5_2_a: (optional) NXaberration ⤆
c_5_2_b: (optional) NXaberration ⤆
c_5_4_a: (optional) NXaberration ⤆
c_5_4_b: (optional) NXaberration ⤆
c_5_6_a: (optional) NXaberration ⤆
c_5_6_b: (optional) NXaberration ⤆
corrector_ax: (optional) NXcomponent ⤆
biprismID: (optional) NXcomponent ⤆
phaseplateID: (optional) NXcomponent ⤆
sensorID: (optional) NXsensor ⤆
actuatorID: (optional) NXactuator ⤆
scan_controller: (recommended) NXscan_controller ⤆
ibeam_column: (optional) NXibeam_column ⤆
operation_mode: (recommended) NX_CHAR ⤆
ion_source: (required) NXsource ⤆
lensID: (optional) NXelectromagnetic_lens ⤆
power_setting: (required) NX_CHAR_OR_NUMBER ⤆
apertureID: (optional) NXaperture ⤆
setting: (required) NX_CHAR_OR_NUMBER
Descriptor for the aperture setting when the exact technical detai ...
Descriptor for the aperture setting when the exact technical details are unknown or not directly controllable as the control software of the microscope does not enable or was not configured to display these values for users.
deflectorID: (optional) NXdeflector ⤆
blankerID: (optional) NXdeflector ⤆
monochromatorID: (optional) NXmonochromator ⤆
applied: (required) NX_BOOLEAN ⤆
sensorID: (optional) NXsensor ⤆
actuatorID: (optional) NXactuator ⤆
scan_controller: (recommended) NXscan_controller ⤆
optics: (recommended) NXem_optical_system ⤆
detectorID: (optional) NXdetector ⤆
operation_mode: (required) NX_CHAR
Operation mode of the detector as displayed by the control software.
stageID: (optional) NXmanipulator ⤆
design: (recommended) NX_CHAR ⤆
rotation: (required) NX_NUMBER ⤆
position: (required) NX_NUMBER ⤆
sample_heater: (optional) NXactuator ⤆
physical_quantity: (required) NX_CHAR ⤆
heater_current: (optional) NX_NUMBER {units=NX_CURRENT}
Nominal current of the heater.
heater_voltage: (optional) NX_NUMBER {units=NX_VOLTAGE}
Nominal voltage of the heater.
nanoprobeID: (optional) NXmanipulator ⤆
gas_injector: (optional) NXcomponent ⤆
sensorID: (optional) NXsensor ⤆
actuatorID: (optional) NXactuator ⤆
simulation: (optional) NXem_simulation
Documentation for a simulation of electron beam-matter interaction.
programID: (recommended) NXprogram ⤆
environment: (recommended) NXcollection ⤆
config: (optional) NXparameters ⤆
Configuration of the simulation
results: (optional) NXprocess ⤆
Results of the simulation
IMAGE: (optional) NXimage
SPECTRUM: (optional) NXspectrum
interaction_volumeID: (optional) NXem_interaction_volume
roiID: (optional) NXroi_process
img: (optional) NXem_img
ebsd: (optional) NXem_ebsd
gnomonic_reference_frame: (recommended) NXcoordinate_system ⤆
pattern_center: (recommended) NXprocess ⤆
measurement: (optional) NXprocess ⤆
simulation: (optional) NXprocess ⤆
calibration: (recommended) NXprocess ⤆
indexing: (optional) NXprocess ⤆
number_of_scan_points: (required) NX_UINT ⤆
indexing_rate: (recommended) NX_NUMBER ⤆
number_of_scan_points: (required) NX_UINT ⤆
unit_cell: (required) NXunit_cell ⤆
ipfID: (required) NXmicrostructure_ipf ⤆
color_model: (required) NX_CHAR ⤆
projection_direction: (required) NX_NUMBER ⤆
odfID: (optional) NXmicrostructure_odf ⤆
pfID: (optional) NXmicrostructure_pf ⤆
microstructureID: (optional) NXmicrostructure ⤆
eds: (optional) NXem_eds
indexing: (required) NXprocess ⤆
atom_types: (required) NX_CHAR ⤆
ELEMENT_SPECIFIC_MAP: (optional) NXimage ⤆
eels: (optional) NXem_eels
Hypertext Anchors¶
List of hypertext anchors for all groups, fields, attributes, and links defined in this class.
/NXem/ENTRY/consistent_rotations/axis_angle_convention-field
/NXem/ENTRY/consistent_rotations/euler_angle_convention-field
/NXem/ENTRY/measurement/eventID/imageID/image_1d/axis_i-field
/NXem/ENTRY/measurement/eventID/imageID/image_1d/axis_i@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_1d/complex-field
/NXem/ENTRY/measurement/eventID/imageID/image_1d/complex@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_1d/imag@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_1d/intensity-field
/NXem/ENTRY/measurement/eventID/imageID/image_1d/intensity@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_1d/real@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_1d/title-field
/NXem/ENTRY/measurement/eventID/imageID/image_1d@axes-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_1d@AXISNAME_indices-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_1d@signal-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_2d/axis_i-field
/NXem/ENTRY/measurement/eventID/imageID/image_2d/axis_i@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_2d/axis_j-field
/NXem/ENTRY/measurement/eventID/imageID/image_2d/axis_j@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_2d/imag@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_2d/intensity-field
/NXem/ENTRY/measurement/eventID/imageID/image_2d/intensity@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_2d/magnitude-field
/NXem/ENTRY/measurement/eventID/imageID/image_2d/magnitude@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_2d/real@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_2d/title-field
/NXem/ENTRY/measurement/eventID/imageID/image_2d@axes-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_2d@AXISNAME_indices-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_2d@signal-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_3d/axis_i-field
/NXem/ENTRY/measurement/eventID/imageID/image_3d/axis_i@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_3d/axis_j-field
/NXem/ENTRY/measurement/eventID/imageID/image_3d/axis_j@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_3d/axis_k-field
/NXem/ENTRY/measurement/eventID/imageID/image_3d/axis_k@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_3d/complex-field
/NXem/ENTRY/measurement/eventID/imageID/image_3d/complex@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_3d/imag@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_3d/intensity-field
/NXem/ENTRY/measurement/eventID/imageID/image_3d/intensity@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_3d/real@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_3d/title-field
/NXem/ENTRY/measurement/eventID/imageID/image_3d@axes-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_3d@AXISNAME_indices-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_3d@signal-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_4d/axis_i-field
/NXem/ENTRY/measurement/eventID/imageID/image_4d/axis_i@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_4d/axis_j-field
/NXem/ENTRY/measurement/eventID/imageID/image_4d/axis_j@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_4d/axis_k-field
/NXem/ENTRY/measurement/eventID/imageID/image_4d/axis_k@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_4d/axis_m-field
/NXem/ENTRY/measurement/eventID/imageID/image_4d/axis_m@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_4d/complex-field
/NXem/ENTRY/measurement/eventID/imageID/image_4d/complex@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_4d/imag@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_4d/intensity-field
/NXem/ENTRY/measurement/eventID/imageID/image_4d/intensity@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_4d/real@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_4d/title-field
/NXem/ENTRY/measurement/eventID/imageID/image_4d@axes-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_4d@AXISNAME_indices-attribute
/NXem/ENTRY/measurement/eventID/imageID/image_4d@signal-attribute
/NXem/ENTRY/measurement/eventID/imageID/PROCESS/detector_identifier-field
/NXem/ENTRY/measurement/eventID/imageID/PROCESS/input/algorithm-field
/NXem/ENTRY/measurement/eventID/imageID/PROCESS/input/checksum-field
/NXem/ENTRY/measurement/eventID/imageID/PROCESS/input/context-field
/NXem/ENTRY/measurement/eventID/imageID/PROCESS/input/file_name-field
/NXem/ENTRY/measurement/eventID/imageID/PROCESS/input/type-field
/NXem/ENTRY/measurement/eventID/imageID/stack_1d/axis_i-field
/NXem/ENTRY/measurement/eventID/imageID/stack_1d/axis_i@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_1d/complex-field
/NXem/ENTRY/measurement/eventID/imageID/stack_1d/complex@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_1d/imag@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_1d/indices_group-field
/NXem/ENTRY/measurement/eventID/imageID/stack_1d/indices_group@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_1d/indices_image-field
/NXem/ENTRY/measurement/eventID/imageID/stack_1d/indices_image@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_1d/intensity-field
/NXem/ENTRY/measurement/eventID/imageID/stack_1d/intensity@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_1d/real@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_1d/title-field
/NXem/ENTRY/measurement/eventID/imageID/stack_1d@axes-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_1d@AXISNAME_indices-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_1d@signal-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_2d/axis_i-field
/NXem/ENTRY/measurement/eventID/imageID/stack_2d/axis_i@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_2d/axis_j-field
/NXem/ENTRY/measurement/eventID/imageID/stack_2d/axis_j@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_2d/complex-field
/NXem/ENTRY/measurement/eventID/imageID/stack_2d/complex@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_2d/imag@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_2d/indices_group-field
/NXem/ENTRY/measurement/eventID/imageID/stack_2d/indices_group@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_2d/indices_image-field
/NXem/ENTRY/measurement/eventID/imageID/stack_2d/indices_image@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_2d/intensity-field
/NXem/ENTRY/measurement/eventID/imageID/stack_2d/intensity@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_2d/real@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_2d/title-field
/NXem/ENTRY/measurement/eventID/imageID/stack_2d@axes-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_2d@AXISNAME_indices-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_2d@signal-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_3d/axis_i-field
/NXem/ENTRY/measurement/eventID/imageID/stack_3d/axis_i@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_3d/axis_j-field
/NXem/ENTRY/measurement/eventID/imageID/stack_3d/axis_j@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_3d/axis_k-field
/NXem/ENTRY/measurement/eventID/imageID/stack_3d/axis_k@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_3d/complex-field
/NXem/ENTRY/measurement/eventID/imageID/stack_3d/complex@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_3d/imag@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_3d/indices_group-field
/NXem/ENTRY/measurement/eventID/imageID/stack_3d/indices_group@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_3d/indices_image-field
/NXem/ENTRY/measurement/eventID/imageID/stack_3d/indices_image@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_3d/intensity-field
/NXem/ENTRY/measurement/eventID/imageID/stack_3d/intensity@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_3d/real@long_name-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_3d/title-field
/NXem/ENTRY/measurement/eventID/imageID/stack_3d@axes-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_3d@AXISNAME_indices-attribute
/NXem/ENTRY/measurement/eventID/imageID/stack_3d@signal-attribute
/NXem/ENTRY/measurement/eventID/instrument/detectorID/operation_mode-field
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column-group
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/actuatorID-group
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/apertureID-group
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/apertureID/setting-field
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/beamID-group
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/biprismID-group
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/blankerID-group
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_ax-group
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_ax/applied-field
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_ax/value_x-field
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_ax/value_y-field
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_csID-group
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_csID/applied-field
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_csID/tableauID-group
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_csID/tableauID/a_1-group
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_csID/tableauID/a_1/magnitude-field
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_csID/tableauID/a_2-group
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_csID/tableauID/a_2/magnitude-field
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_csID/tableauID/a_3-group
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_csID/tableauID/a_3/magnitude-field
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_csID/tableauID/a_4-group
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_csID/tableauID/a_4/magnitude-field
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_csID/tableauID/a_6-group
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_csID/tableauID/a_6/magnitude-field
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_csID/tableauID/b_2-group
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_csID/tableauID/b_2/magnitude-field
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_csID/tableauID/b_4-group
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_csID/tableauID/b_4/magnitude-field
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_csID/tableauID/c_1-group
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_csID/tableauID/c_1/magnitude-field
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_csID/tableauID/c_1_0-group
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_csID/tableauID/c_1_2_a-group
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_csID/tableauID/c_1_2_b-group
/NXem/ENTRY/measurement/eventID/instrument/ebeam_column/corrector_csID/tableauID/c_2_1_a-group
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/NXem/ENTRY/measurement/instrument/ibeam_column/ion_source/emitter_type-field
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/NXem/ENTRY/measurement/instrument/ibeam_column/lensID-group
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/NXem/ENTRY/measurement/instrument/ibeam_column/scan_controller-group
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/NXem/ENTRY/roiID/ebsd/indexing/phaseID/ipfID/color_model-field
/NXem/ENTRY/roiID/ebsd/indexing/phaseID/ipfID/legend/axis_x-field
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/NXem/ENTRY/roiID/ebsd/indexing/phaseID/ipfID/legend/axis_y-field
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/NXem/ENTRY/roiID/ebsd/indexing/phaseID/ipfID/map/axis_z-field
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/NXem/ENTRY/roiID/ebsd/pattern_center/y_boundary_convention-field
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/NXem/ENTRY/roiID/eds/indexing/ELEMENT_SPECIFIC_MAP/image_2d-group
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