2.3.3.3.134. NXibeam_column¶
Status:
base class, extends NXcomponent
Description:
Base class for a set of components equipping an instrument with FIB capabilities ...
Base class for a set of components equipping an instrument with FIB capabilities.
Focused-ion-beam (FIB) capabilities turn especially scanning electron microscopes into specimen preparation labs. FIB is a material preparation technique whereby portions of the sample are illuminated with a focused ion beam with controlled intensity. The beam is intense enough and with sufficient ion momentum to remove material in a controlled manner.
The fact that an electron microscope with FIB capabilities has needs a second gun with own relevant control circuits, focusing lenses, and other components, warrants the definition of an own base class to group these components and distinguish them from the lenses and components for creating and shaping the electron beam.
For more details about the relevant physics and application examples consult the literature, for example:
Symbols:
No symbol table
- Groups cited:
NXactuator, NXaperture, NXbeam, NXchamber, NXcomponent, NXdeflector, NXion, NXlens_em, NXmonochromator, NXsensor, NXsource
Structure:
CHAMBER: (optional) NXchamber
ion_source: (optional) NXsource
The source which creates the ion beam.
Given name/alias for the ion gun.
emitter_type: (optional) NX_CHAR
Emitter type used to create the ion beam. ...
Emitter type used to create the ion beam.
If the emitter type is other, give further details in the description field.
Any of these values:
liquid_metal|plasma|gas_field|otherdescription: (optional) NX_CHAR
Ideally, a (globally) unique persistent identifier, link, ...
Ideally, a (globally) unique persistent identifier, link, or text to a resource which gives further details.
flux: (optional) NX_NUMBER {units=NX_ANY}
Average/nominal flux
brightness: (optional) NX_NUMBER {units=NX_ANY}
Average/nominal brightness
current: (optional) NX_NUMBER {units=NX_CURRENT}
Charge current
voltage: (optional) NX_NUMBER {units=NX_VOLTAGE}
Ion acceleration voltage upon source exit and ...
Ion acceleration voltage upon source exit and entering the vacuum flight path.
ion_energy_profile: (optional) NX_NUMBER {units=NX_ENERGY}
To be defined more specifically. Community suggestions are welcome.
probe: (optional) NXion
Which ionized elements or molecular ions form the beam. ...
Which ionized elements or molecular ions form the beam. Examples are gallium, helium, neon, argon, krypton, or xenon, O2+.
LENS_EM: (optional) NXlens_em
APERTURE: (optional) NXaperture
MONOCHROMATOR: (optional) NXmonochromator
COMPONENT: (optional) NXcomponent
SENSOR: (optional) NXsensor
ACTUATOR: (optional) NXactuator
BEAM: (optional) NXbeam
Individual characterization results for the position, shape, ...
Individual characterization results for the position, shape, and characteristics of the ion beam.
NXtransformations should be used to specify the location or position at which details about the ion beam are probed.
DEFLECTOR: (optional) NXdeflector
Hypertext Anchors¶
List of hypertext anchors for all groups, fields, attributes, and links defined in this class.
