2.3.3.3.151. NXscanbox_em

Status:

base class (contribution), extends NXcomponent

Description:

Scan box and coils which deflect a beam of charged particles in a controlled man ...

Scan box and coils which deflect a beam of charged particles in a controlled manner.

The scan box is instructed by (an) instance(s) of NXprogram, some control software, which is not necessarily the same program as for all components of an instrument.

The scanbox directs the probe of charged particles (electrons, ions) to controlled locations according to a scan scheme and plan.

Symbols:

No symbol table

Groups cited:

NXcircuit, NXdeflector

Structure:

scan_schema: (optional) NX_CHAR

Name of the typically tech-partner-specific term that specifies an ...

Name of the typically tech-partner-specific term that specifies an automated protocol which controls the details how the components of the scan_box and instrument work together to achieve a controlled scanning of the beam over the sample surface.

In most cases users do not know, have to care, or are able to disentangle the details of the spatiotemporal dynamics of the components of the instrument. Instead, they often rely on the assumption that the microscope and control software work as expected. The field scan_schema can be used to add some constraints on how the beam was scanned over the surface.

dwell_time: (optional) NX_NUMBER {units=NX_TIME}

Time period during which the beam remains at one position. ...

Time period during which the beam remains at one position.

This concept is related to term Dwell Time of the EMglossary standard.

flyback_time: (optional) NX_NUMBER {units=NX_TIME}

Time period during which the beam moves from the final position of one scan ...

Time period during which the beam moves from the final position of one scan line to the starting position of the subsequent scan line.

This concept is related to term Flyback Time of the EMglossary standard.

DEFLECTOR: (optional) NXdeflector

Details about components which realize the deflection technically. ...

Details about components which realize the deflection technically.

This concept should be used for all those components that implement the scanning of the beam, while components like beam blankers etc. should use rather the NXdeflector concept of the NXebeam_column base class.

CIRCUIT: (optional) NXcircuit

Hypertext Anchors

List of hypertext anchors for all groups, fields, attributes, and links defined in this class.

NXDL Source:

https://github.com/FAIRmat-NFDI/nexus_definitions/tree/fairmat/contributed_definitions/NXscanbox_em.nxdl.xml