2.3.3.3.86. NXspm_piezo_sensor¶
Status:
base class (contribution), extends NXsensor
Description:
This piezo sensor group refers to the height (or Z) piezo sensor.
Symbols:
No symbol table
- Groups cited:
NXspm_piezo_config, NXspm_piezoelectric_material, NXspm_positioner
Structure:
x: (optional) NX_NUMBER {units=NX_LENGTH}
The x position (e.g., target or averaged target value) of the piezo.
y: (optional) NX_NUMBER {units=NX_LENGTH}
The y position (e.g., target or averaged target value) of the piezo.
z: (optional) NX_NUMBER {units=NX_LENGTH}
The z position (e.g., target or averaged target value) of the piezo.
AXISoffset_value: (optional) NX_NUMBER {units=NX_LENGTH}
The offset value for the piezo axis (X, Y, or Z) that will be added ...
The offset value for the piezo axis (X, Y, or Z) that will be added to the measured value.
piezo_configuration: (optional) NXspm_piezo_config
The piezo configuration information like piezoelectric calibration and materia ...
The piezo configuration information like piezoelectric calibration and material properties.
SPM_POSITIONER: (optional) NXspm_positioner
The positioner information like the position of the tip, the position of the ...
The positioner information like the position of the tip, the position of the sample, PID controller etc.
piezo_material: (optional) NXspm_piezoelectric_material
The material description and properties of the piezoelectric scanner materials.
Hypertext Anchors¶
List of hypertext anchors for all groups, fields, attributes, and links defined in this class.
