Movpe
FilamentTemperature¶
description: Temperature of a heated element used to keep the substrate hot.
inherits from: nomad_material_processing.vapor_deposition.general.Temperature
properties:
| name | type | |
|---|---|---|
| value | float |
The observed value as a function of time. shape= ['*'], unit=kelvin |
| set_value | float |
The set value(s) (i.e. the intended values) set. shape= ['*'], unit=kelvin |
MovpeSampleParameters¶
inherits from: nomad_material_processing.vapor_deposition.general.SampleParameters
properties:
| name | type | |
|---|---|---|
| filament_temperature | FilamentTemperature |
sub-section |
normalization without further documentation
MovpeChamberEnvironment¶
inherits from: nomad_material_processing.vapor_deposition.general.ChamberEnvironment
properties:
| name | type | |
|---|---|---|
| uniform_gas_flow_rate | nomad_material_processing.vapor_deposition.general.VolumetricFlowRate |
sub-section |
| pressure | nomad_material_processing.vapor_deposition.general.Pressure |
sub-section |
| throttle_valve | nomad_material_processing.vapor_deposition.general.Pressure |
sub-section |
| rotation | nomad_material_processing.vapor_deposition.cvd.general.Rotation |
sub-section |
| heater | nomad_material_processing.vapor_deposition.general.SubstrateHeater |
sub-section |
StepMovpe¶
description: Growth step for MOVPE
inherits from: nomad_material_processing.vapor_deposition.cvd.general.CVDStep, nomad.datamodel.metainfo.plot.PlotSection
properties:
| name | type | |
|---|---|---|
| sample_parameters | MovpeSampleParameters |
sub-section, repeats |
| sources | nomad_material_processing.vapor_deposition.cvd.general.CVDSource |
sub-section, repeats |
| environment | MovpeChamberEnvironment |
sub-section |
normalization:
The normalizer for the CVDStep class.
Args: archive (EntryArchive): The archive containing the section that is being normalized. logger (BoundLogger): A structlog logger.
Movpe¶
description: Metal-organic Vapor Phase Epitaxy (MOVPE) is a chemical vapor deposition method used to produce single- or multi-layered thin films.
inherits from: nomad_material_processing.vapor_deposition.cvd.general.ChemicalVaporDeposition, nomad.datamodel.data.EntryData
properties:
| name | type | |
|---|---|---|
| method | str |
A short consistent handle for the applied method. default= MOVPE |
| steps | StepMovpe |
The steps of the deposition process. sub-section, repeats |
normalization:
The normalizer for the PhysicalVaporDeposition class.
Args: archive (EntryArchive): The archive containing the section that is being normalized. logger (BoundLogger): A structlog logger.