Data from PHI instruments¶
The reader supports .spe (single spectra) and .pro (sputter profile / external
parameter scan) files from PHI Electronics VersaProbe 4
instruments, written by PHI MultiPak
software.
The parser is in
src/pynxtools_xps/parsers/phi/.
Supported versions¶
| Format | Extension | Software | Supported versions |
|---|---|---|---|
| PHI MultiPak single spectrum | .spe |
PHI MultiPak | any (SS 3.3.3.2.1 tested) |
| PHI MultiPak profile | .pro |
PHI MultiPak | any (SS 3.3.3.2.1 tested) |
.spe data (single spectrum)¶
Example data is available in the
examples/phi/ directory.
user@box:~$ dataconverter SnO2_10nm.spe eln_data_phi.yaml --reader xps --nxdl NXxps --output SnO2_10nm.spe.nxs
.pro data (profiling)¶
Example data is available in the
examples/phi/ directory.
user@box:~$ dataconverter SnO2_10nm_1.pro eln_data_phi.yaml --reader xps --nxdl NXxps --output SnO2_10nm_1.pro.nxs
Acknowledgements¶
We thank Sebastian Benz and Dr. Joachim Sann from Justus-Liebig-Universität Gießen for providing these example data sets.