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Data from PHI instruments

The reader supports .spe (single spectra) and .pro (sputter profile / external parameter scan) files from PHI Electronics VersaProbe 4 instruments, written by PHI MultiPak software.

The parser is in src/pynxtools_xps/parsers/phi/.

Supported versions

Format Extension Software Supported versions
PHI MultiPak single spectrum .spe PHI MultiPak any (SS 3.3.3.2.1 tested)
PHI MultiPak profile .pro PHI MultiPak any (SS 3.3.3.2.1 tested)

.spe data (single spectrum)

Example data is available in the examples/phi/ directory.

user@box:~$ dataconverter SnO2_10nm.spe eln_data_phi.yaml --reader xps --nxdl NXxps --output SnO2_10nm.spe.nxs

.pro data (profiling)

Example data is available in the examples/phi/ directory.

user@box:~$ dataconverter SnO2_10nm_1.pro eln_data_phi.yaml --reader xps --nxdl NXxps --output SnO2_10nm_1.pro.nxs

Acknowledgements

We thank Sebastian Benz and Dr. Joachim Sann from Justus-Liebig-Universität Gießen for providing these example data sets.

Further reading