2.3.3.3.106. NXinstrument_em¶
Status:
base class (contribution), extends NXinstrument
Description:
Symbols:
No symbol table
- Groups cited:
NXactuator, NXdetector, NXebeam_column, NXfabrication, NXibeam_column, NXmanipulator, NXoptical_system_em, NXpump, NXscanbox_em, NXsensor
Structure:
Given name of the microscope at the hosting institution. ...
Given name of the microscope at the hosting institution. This is an alias. Examples could be NionHermes, Titan, JEOL, Gemini, etc.
location: (optional) NX_CHAR
Location of the lab or place where the instrument is installed. ...
Location of the lab or place where the instrument is installed. Using GEOREF is preferred.
type: (recommended) NX_CHAR
Different types of electron microscopes exist: ...
Different types of electron microscopes exist:
sem, a scanning electron microscope without focused-ion beam capabilities
fib, a scanning electron microscope with focused-ion beam capabilities irrespective whether these were used or not
tem, a transmission electron microscope
NXem is one joint data model that can be used to document research that is performed with several of these types of microscopes (SEM, TEM, or FIB). The NXem data model stresses that these types of instruments despite having several differences are still all electron beamlines with which to probe electron and/or ion matter interaction and in fact in practice have many similarities in how they are used, the components, they contain, etc.
This field can be used in research data management systems for enabling a categorization or tagging of experiments without having to analyze if groups like NXibeam_column are present (which would indicate type is fib) or if certain lens configurations or instrument models are used which suggests the microscope is a scanning (sem) or transmission electron microscope (tem):
Any of these values:
sem|fib|temFABRICATION: (optional) NXfabrication ⤆
EBEAM_COLUMN: (optional) NXebeam_column
IBEAM_COLUMN: (optional) NXibeam_column
OPTICAL_SYSTEM_EM: (optional) NXoptical_system_em
DETECTOR: (optional) NXdetector ⤆
Description of the type of the detector. ...
Description of the type of the detector.
Electron microscopes have typically multiple detectors. Different technologies are in use like CCD, scintillator, direct electron, CMOS, or image plate to name but a few.
SCANBOX_EM: (optional) NXscanbox_em
stage: (optional) NXmanipulator
Stages in an electron microscope are multi-functional devices. ...
Stages in an electron microscope are multi-functional devices.
Stages enable experimentalists the application of controlled external stimuli on the specimen. Modern stages realize a hierarchy of components. A multi-axial tilt rotation holder is a good example where the control of each degree of freedom is technically implemented via providing instances of either NXpositioner, NXactuator, or specialized NXobject that achieve the rotating and positioning of the specimen.
The physical process of mounting a specimen on a stage in practice often comes with an own hierarchy of fixtures to bridge e.g. length scales technically. An example from atom probe microscopy is that researchers may work with wire samples which are clipped into a larger fixing unit to enable careful specimen handling. Alternatively, a microtip is a silicon post upon which e.g. an atom probe specimen is mounted. Multiple of such microtips are then grouped into a microtip array to conveniently enable loading of multiple specimens into the instrument with fewer operations. There are further scenarios typically encountered related to mounting and locating specimens inside an electron microscope, a few examples follow:
A nanoparticle on a copper grid. The copper grid is the holder. This grid itself is fixed to a stage.
An atom probe specimen fixed in a stub. In this case the stub can be considered the holder, while the cryostat temperature control unit is a component of the stage.
For in-situ experiments with e.g. chips with read-out electronics as actuators, the chips are again placed in a larger unit. A typical example are in-situ experiments using e.g. the tools of Protochips.
Other examples are (quasi) in-situ experiments where experimentalists anneal or deform the specimen via e.g. in-situ tensile testing machines which are mounted on the specimen holder.
For specific details and inspiration about stages in electron microscopes:
Stages in transmission electron microscopy (page 103, table 4.2)
Further stages in transmission electron microscopy (page 124ff)
Specimens in atom probe (page 47ff)
design: (optional) NX_CHAR
Principal design of the stage. ...
Principal design of the stage.
Exemplar terms could be side_entry, top_entry, single_tilt, quick_change, multiple_specimen, bulk_specimen, double_tilt, tilt_rotate, heating_chip, atmosphere_chip, electrical_biasing_chip, liquid_cell_chip
alias: (optional) NX_CHAR
Free-text field to give a term how that a stage_lab at this level of the ...
Free-text field to give a term how that a stage_lab at this level of the stage_lab hierarchy is commonly referred to. Examples could be stub, puck, carousel, microtip, clip, holder, etc.
tilt1: (optional) NX_NUMBER {units=NX_ANGLE}
@comment: (optional) NX_CHAR
Discouraged free-text field to provide details about how to interpret tilt1.
tilt2: (optional) NX_NUMBER {units=NX_ANGLE}
The interpretation of this tilt2 value can be contextualized via the comment ...
The interpretation of this tilt2 value can be contextualized via the comment attribute. However, it is better to describe the reference frame in which the tilt is defined explicitly using instances of NXtransformations and respective instances of NXcoordinate_system. Especially when this NXinstrument_em base class is used in an application definition like NXem.
@comment: (optional) NX_CHAR
Discouraged free-text field to provide details about how to interpret tilt2.
rotation: (optional) NX_NUMBER {units=NX_ANGLE}
The interpretation of this rotation value can be contextualized via the comm ...
The interpretation of this rotation value can be contextualized via the comment attribute. However, it is better to describe the reference frame in which the rotation is defined explicitly using instances of NXtransformations and respective instances of NXcoordinate_system. Especially when this NXinstrument_em base class is used in an application definition like NXem.
@comment: (optional) NX_CHAR
Discouraged free-text field to provide details about how to interpret rotation.
position: (optional) NX_NUMBER (Rank: 1, Dimensions: [3]) {units=NX_LENGTH}
The interpretation of these position values can be contextualized via the co ...
The interpretation of these position values can be contextualized via the comment attribute. However, it is better to describe the reference frame in which the position values are defined explicitly using instances of NXtransformations and respective instances of NXcoordinate_system. Especially when this NXinstrument_em base class is used in an application definition like NXem.
FABRICATION: (optional) NXfabrication ⤆
nanoprobe: (optional) NXmanipulator
In contrast to the stage, the nanoprobe is an additional manipulator that is s ...
In contrast to the stage, the nanoprobe is an additional manipulator that is specifically frequently found component of FIB/SEM instruments. A nanoprobe is used to pick up and relocated portions of the specimen that have been cut free to realize specialized geometries locally and enable site-specific measurements.
FABRICATION: (optional) NXfabrication ⤆
PUMP: (optional) NXpump
ACTUATOR: (optional) NXactuator ⤆
Hypertext Anchors¶
List of hypertext anchors for all groups, fields, attributes, and links defined in this class.
The interpretation of this tilt1 value can be contextualized via the comment ...
The interpretation of this tilt1 value can be contextualized via the comment attribute. However, it is better to describe the reference frame in which the tilt is defined explicitly using instances of NXtransformations and respective instances of NXcoordinate_system. Especially when this NXinstrument_em base class is used in an application definition like NXem.